Model and Analysis of a High Sensitivity Resonant Optical Read-Out Approach Suitable for Cantilever Sensor Arrays

Author

Putrino, Gino ; Keating, Adrian ; Martyniuk, Mariusz ; Faraone, Lorenzo ; Dell, John

Author_Institution

Sch. of Electr., Univ. of Western Australia, Crawley, WA, Australia

Volume

30

Issue

12

fYear

2012

fDate

6/15/2012 12:00:00 AM

Firstpage

1863

Lastpage

1868

Abstract

We investigate an optically resonant cavity which is created between a reflecting micro-cantilever and a diffraction grating etched into a silicon waveguide. Changes in cavity resonance, induced by small deflections of the micro-cantilever result in large changes in an optical signal transmitted through the waveguide. An analytical model can predict the cantilever position for maximum and minimum transmission and is confirmed by three-dimensional finite difference time domain (FDTD) simulations. This approach can be used to accurately determine the position of a micro-cantilever with a predicted optimal shot noise limited deflection noise density of 4.1 fm/ Hz.

Keywords

diffraction gratings; etching; micro-optomechanical devices; microcavities; microsensors; optical waveguides; shot noise; 3D finite difference time domain simulations; cantilever position; cantilever sensor arrays; cavity resonance; deflection noise density; diffraction grating; high sensitivity resonant optical read-out approach; micro-cantilever; optimal shot noise; silicon waveguide; Diffraction gratings; Frequency modulation; Gratings; Noise; Optical device fabrication; Optical sensors; Optical waveguides; Biological sensing and sensors; MEMS; MOEMS; diffraction gratings; interference;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2012.2190973

Filename

6169939