Title :
High Precision Electrohydrodynamic Printing of Polymer Onto Microcantilever Sensors
Author :
Pikul, James H. ; Graf, Phil ; Mishra, Sandipan ; Barton, Kira ; Kim, Yong-Kwan ; Rogers, John A. ; Alleyne, Andrew ; Ferreira, Placid M. ; King, William P.
Author_Institution :
Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
We report electrohydrodynamic jet printing to deposit 2-27 μm diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50-4130 Hz corresponded to a polymer mass of 4.5-135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.
Keywords :
cantilevers; drops; electrohydrodynamics; microsensors; printing; droplet position; electrohydrodynamic jet printing; electrohydrodynamic printing; frequency 50 Hz to 4130 Hz; gravimetry analysis; micromechanical sensors; polymer droplets; polymer onto microcantilever sensors; pulse-modulated source voltage; size 2 mum to 27 mum; Electrohydrodynamics; Polyethylene; Printing; Sensitivity; Sensors; Electrohydrodynamics; mass sensing; microcantilever; microelectromechanical systems; polymer deposition; polymer printing; sensor;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2011.2127472
