Title :
On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS
Author :
Boussaïd, Farïd ; Olivié, François ; Benzohra, Mohammed ; Martinez, Augustin
Author_Institution :
Lab. d´´Anal. et d´´Archit. des Syst., CNRS, Toulouse, France
fDate :
6/1/1998 12:00:00 AM
Abstract :
A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized
Keywords :
deep level transient spectroscopy; eigenvalues and eigenfunctions; electron traps; elemental semiconductors; germanium; matrix decomposition; matrix inversion; phosphorus; silicon; Si:P,Ge; capacitance transient analysis; deep level transient spectroscopy; eigenvalues; electrically active defects; electron traps; figure of merit; germanium preamorphization step; low trap concentrations; matrix pencil method; multiexponential transient; noise sensitivity; simulation tests; statistical variance; Capacitance; Electron traps; Energy capture; Energy states; Isothermal processes; Semiconductor device noise; Signal resolution; Spectroscopy; Temperature; Transient analysis;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
