Title :
Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]
Author :
Jin, W.L. ; Mote, C.D., Jr.
Author_Institution :
California Univ., Berkeley, CA, USA
fDate :
6/1/1998 12:00:00 AM
Abstract :
A six-component miniature force sensor (5×5×5 mm3 ) is developed using microfabrication and conventional precision machining technologies. High sensitivity and high stiffness are obtained simultaneously with a novel silicon sensing element design. Fair agreement between predicted and measured sensitivities is obtained
Keywords :
diaphragms; force sensors; micromachining; microrobots; microsensors; silicon; strain gauges; 3D structure; 5 mm; Si; conventional machining; high sensitivity; high stiffness; microfabrication; microrobotics application; multicomponent force sensor; precision machining; sensing element design; silicon micromachining; six-component miniature force sensor; stiffness; strain gauge; Bonding; Capacitive sensors; Deformable models; Etching; Force sensors; Machining; Micromachining; Robot sensing systems; Silicon; Strain measurement;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
