Design and fabrication of low-loss polymer waveguide components for on-chip optical interconnection

Author

Robitaille, Lucie ; Callender, Claire L. ; Noad, Julian P.

Author_Institution

Commun. Res. Centre, Ottawa, Ont., Canada

Volume

8

Issue

12

fYear

1996

Firstpage

1647

Lastpage

1649

Abstract

This paper reports the fabrication and characterization of straight and curved polyimide waveguides for on-chip optical signal distribution in GaAs-based optoelectronic integrated circuits. Polyimide ridge waveguides with propagation losses (at 830 nm) as low as 0.6 dB/cm have been fabricated. S-bends and splitters with low curvature losses and good splitting ratios have also been successfully fabricated and tested. The effects of the material properties and radius of curvature on the optical losses are presented, and the advantages of this polymer technology are discussed.

Keywords

III-V semiconductors; gallium arsenide; integrated optoelectronics; optical communication equipment; optical fabrication; optical losses; optical polymers; optical waveguides; ridge waveguides; 830 nm; GaAs; GaAs-based optoelectronic integrated circuits; S-bends; curved polyimide waveguides; good splitting ratios; low curvature losses; low-loss polymer waveguide component design; low-loss polymer waveguide component fabrication; material properties; on-chip optical interconnection; on-chip optical signal distribution; optical beam splitters; optical losses; polyimide ridge waveguides; polymer technology; propagation losses; radius of curvature; straight polyimide waveguides; Integrated optics; Optical design; Optical device fabrication; Optical interconnections; Optical losses; Optical polymers; Optical waveguide components; Optical waveguides; Photonic integrated circuits; Polyimides;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.544706

Filename

544706