Title :
Design and simulation analysis of RF MEMS dual output switch for Ku-band applications
Author :
Yazhini, S. ; Sreeja, B.S.
Author_Institution :
Dept. of Electron. & Commun. Eng., SSN Coll. of Eng., Chennai, India
Abstract :
This paper presents the design, fabrication and characterization of RF MEMS dual output switch implemented in silicon substrate of thickness 5 μm. The topology of the switch is cantilever based microelectro mechanical system(MEMS) switch for the performance in the Ku band of frequency for satellite payload application. Along with the process of fabrication, design simulation and the analysis of RF performance parameter characterization of the switch exhibit an insertion loss of around 0.8dB and isolation in the range of 47dB.for the switch structure in Ku band of frequency(12-18GHz).
Keywords :
cantilevers; microswitches; microwave switches; Ku-band applications; RF MEMS dual output switch; cantilever based microelectromechanical system; frequency 12 GHz to 18 GHz; satellite payload application; size 5 mum; switch topology; Micromechanical devices; Radio frequency; Satellites; Silicon; Software; Switches; Dual output switch; HFSS(High Frequency Structure Simulator); Intellisuite; RF MEMS; Satellite payload; simulation;
Conference_Titel :
Communications and Signal Processing (ICCSP), 2014 International Conference on
Conference_Location :
Melmaruvathur
Print_ISBN :
978-1-4799-3357-0
DOI :
10.1109/ICCSP.2014.6950030
