DocumentCode :
1471303
Title :
Precision determination of the density of a single crystal silicon sphere and evaluation of the Avogadro constant
Author :
Kenny, Michael J. ; Leistner, Achim J. ; Walsh, Christopher J. ; Fen, Kitty ; Giardini, Walter J. ; Wielunski, Leszek S. ; Netterfield, Roger P. ; Ward, Bradley R.
Author_Institution :
CSIRO, Lindfield, NSW, Australia
Volume :
50
Issue :
2
fYear :
2001
fDate :
4/1/2001 12:00:00 AM
Firstpage :
587
Lastpage :
592
Abstract :
Density measurements with relative uncertainty of 1×10-7 have been made on a highly polished 1-kg single crystal silicon sphere with out-of-roundness <40 nm. Roundness was profiled using a 2-D Talyrond machine and 3-D profiles were produced. The diameter was obtained using optical interferometry for a series of breadth measurements at carefully selected points and by combining them with roundness data. The mass was obtained relative to a 1-kg stainless steel reference with appropriate corrections for air buoyancy and for convection currents due to small temperature differentials. Surface oxide thickness was measured using optical ellipsometry and the data were corrected for this oxide thickness. The molar mass, crystal quality and lattice parameter have been measured elsewhere, enabling a determination of the Avogadro constant to be made. The purpose is to obtain a definition of the kilogram in terms of a specific number of 12C atoms
Keywords :
constants; density measurement; ellipsometry; light interferometry; mass measurement; measurement standards; measurement uncertainty; units (measurement); 1 kg; 2D Talyrond machine; 3D profiles; Avogadro constant; Si; air buoyancy; breadth measurements; convection currents; crystal quality; density measurements; kilogram definition; lattice parameter; molar mass; optical ellipsometry; optical interferometry; out-of-roundness; oxide thickness; relative uncertainty; roundness data; single crystal sphere; stainless steel reference; temperature differentials; Atomic measurements; Fabrication; Laboratories; Lattices; Measurement uncertainty; Optical interferometry; Silicon; Steel; Temperature; Thickness measurement;
fLanguage :
English
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9456
Type :
jour
DOI :
10.1109/19.918198
Filename :
918198
Link To Document :
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