Author :
Nurani, R.K. ; Seshadri, Sangeetha
Abstract :
This special issue of the IEEE Transactions on Semiconductor Manufacturing comprises of five selected papers from ASMC´97. The papers present tools and approaches that contribute to manufacturing excellence. With the advent of automatic defect classification, better process control techniques are necessary to factor in the information generated by sophisticated inspection and monitoring of processes. An overview of the technical articles and features is presented.
Keywords :
Business; Electronics industry; Engineering management; Inspection; Manufacturing automation; Process control; Pulp manufacturing; Semiconductor device manufacture; Stress; Yield estimation;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.1999.744512
