DocumentCode
1471571
Title
Comparative Analysis of MIS Capacitance Structures With High-k Dielectrics Under Gamma,
O and p Radiation
Author
Quinteros, C.P. ; Salomone, L. Sambuco ; Redin, E. ; Rafí, J.M. ; Zabala, M. ; Faigón, A. ; Palumbo, F. ; Campabadal, F.
Author_Institution
Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET) and CNEA, San Martín (1650), Argentina
Volume
59
Issue
4
fYear
2012
Firstpage
767
Lastpage
772
Abstract
MIS capacitance structures, with Hafnium Oxide, Alumina and nanolaminate as dielectrics were studied under gamma photons
, 25 MeV oxygen ions and 10 MeV protons radiation using capacitance-voltage (C-V) characterization.
Keywords
Capacitance; Capacitance-voltage characteristics; Capacitors; Hafnium oxide; Hysteresis; Radiation effects; High-k gate dielectrics; MOS devices; radiation effects;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.2012.2187217
Filename
6170909
Link To Document