Title :
Silicon photonics optical DeMUX technology for WDM applications
Author :
Seok-Hwan Jeong ; Tanaka, Yuichi ; Morito, Ken
Author_Institution :
AIST West-7SCR, Photonics Electron. Technol. Res. Assoc. (PETRA), Tsukuba, Japan
Abstract :
We report recent progress of high-performance Siwire-based WDM devices based on higher-order microring resonators and multi-stage delayed interferometers fabricated by 300-mm wafer-scale 193-nm ArF-immersion CMOS process.
Keywords :
CMOS integrated circuits; demultiplexing; elemental semiconductors; integrated optoelectronics; micro-optics; micromechanical resonators; optical communication equipment; silicon; wavelength division multiplexing; ArF; Si; WDM applications; higher-order microring resonators; multistage delayed interferometers; optical DeMUX technology; silicon photonics; size 193 nm; size 300 mm; wafer-scale ArF-immersion CMOS process; Adaptive optics; Optical crosstalk; Optical device fabrication; Optical filters; Optical interferometry; Optical resonators; Wavelength division multiplexing; Silicon photonics; WDM devices; delayed interfermeters; microring resonators; optical demultiplexers;
Conference_Titel :
Optical Internet 2014 (COIN), 2014 12th International Conference on
Conference_Location :
Jeju
DOI :
10.1109/COIN.2014.6950584
