DocumentCode
1474487
Title
Design and control of a high precision electron beam machine
Author
Vaucher, J.G. ; Gourley, S.F. ; Hardy, C.J. ; Hoffman, G.R.
Volume
33
Issue
2
fYear
1967
fDate
5/20/1905 12:00:00 AM
Firstpage
83
Lastpage
96
Abstract
A two-lens electron beam machine is designed to give maximum power density in spot diameters ranging from 1.5 ¿m to 10 ¿m. The beam is deflected in a raster and modulated by a simple pattern generator. The design and performance of the electron optical system and the present control equipment are discussed together with a proposal for an on-line computer control system
Keywords
computer applications; electron beams; electron lenses; electron optics; manufacturing processes;
fLanguage
English
Journal_Title
Radio and Electronic Engineer
Publisher
iet
ISSN
0033-7722
Type
jour
DOI
10.1049/ree.1967.0014
Filename
5267158
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