DocumentCode
1475131
Title
Transition edge sensor array development
Author
Deiker, S. ; Chervenak, J. ; Hilton, G.C. ; Irwin, K.D. ; Martinis, John M. ; Nam, S. ; Wollman, D.A.
Author_Institution
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Volume
11
Issue
1
fYear
2001
fDate
3/1/2001 12:00:00 AM
Firstpage
469
Lastpage
472
Abstract
NIST is fabricating multi-pixel arrays of transition edge sensor (TES) microcalorimeter detectors for use in microanalysis and X-ray astrophysics. We have developed both room temperature digital feedback electronics and a successful SQUID multiplexing technology that will be applied to form a practical, expandable system. We are also exploring surface micromachining techniques to enable the fabrication of large-scale, close-packed arrays of TES microcalorimeters
Keywords
X-ray detection; calorimeters; micromachining; microsensors; particle calorimetry; superconducting arrays; superconducting particle detectors; SQUID multiplexing technology; X-ray astronomy; cryogenic X-ray detector; microanalysis; microcalorimeter; multi-pixel array; room temperature digital readout electronics; superconducting transition edge sensor; surface micromachining; Astrophysics; Fabrication; Feedback; Micromachining; NIST; SQUIDs; Sensor arrays; Temperature sensors; X-ray detection; X-ray detectors;
fLanguage
English
Journal_Title
Applied Superconductivity, IEEE Transactions on
Publisher
ieee
ISSN
1051-8223
Type
jour
DOI
10.1109/77.919384
Filename
919384
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