Title :
Transition edge sensor array development
Author :
Deiker, S. ; Chervenak, J. ; Hilton, G.C. ; Irwin, K.D. ; Martinis, John M. ; Nam, S. ; Wollman, D.A.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fDate :
3/1/2001 12:00:00 AM
Abstract :
NIST is fabricating multi-pixel arrays of transition edge sensor (TES) microcalorimeter detectors for use in microanalysis and X-ray astrophysics. We have developed both room temperature digital feedback electronics and a successful SQUID multiplexing technology that will be applied to form a practical, expandable system. We are also exploring surface micromachining techniques to enable the fabrication of large-scale, close-packed arrays of TES microcalorimeters
Keywords :
X-ray detection; calorimeters; micromachining; microsensors; particle calorimetry; superconducting arrays; superconducting particle detectors; SQUID multiplexing technology; X-ray astronomy; cryogenic X-ray detector; microanalysis; microcalorimeter; multi-pixel array; room temperature digital readout electronics; superconducting transition edge sensor; surface micromachining; Astrophysics; Fabrication; Feedback; Micromachining; NIST; SQUIDs; Sensor arrays; Temperature sensors; X-ray detection; X-ray detectors;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
