Title :
Two-Axis, Miniature Fluxgate Sensors
Author :
Frydrych, Piotr ; Szewczyk, Roman ; Salach, Jacek ; Trzcinka, Krzysztof
Author_Institution :
Inst. of Metrol. & Biomed. Eng., Warsaw Univ. of Technol., Warsaw, Poland
fDate :
4/1/2012 12:00:00 AM
Abstract :
Miniature fluxgate sensors are recently intensively developed and have become a valuable alternative to other magnetic sensors types. Presented two-axis miniature fluxgate sensors show new opportunities for further miniaturization of fluxgate magnetometers. Frame-shaped amorphous alloys cores for the sensors were etched from 25 μm-thick tape. Sensors were made in printed circuit board (PCB) multilayer technology. Sensors with Fe-based and Co-based cores were tested for different values of constant magnetic field in two directions. Experimental results confirmed their ability to accurately obtain two directional magnetic field measurements.
Keywords :
amorphous magnetic materials; boron alloys; cobalt alloys; etching; fluxgate magnetometers; iron alloys; magnetic cores; magnetic multilayers; magnetic sensors; magnetic variables measurement; nickel alloys; printed circuits; silicon alloys; Co-based cores; Co66Fe4NiSi15B14; Fe-based cores; Fe67Co18SiB14; PCB multilayer technology; constant magnetic field; directional magnetic field measurements; etching; fluxgate magnetometers; frame-shaped amorphous alloy cores; miniaturization; printed circuit board; two-axis miniature fluxgate sensors; Coils; Magnetic cores; Magnetic sensors; Magnetometers; Metals; Silicon; Amorphous magnetic materials; fluxgate sensors; magnetic field measurements;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2173475
