Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

Author

Tralshawala, Nilesh ; Brekosky, Regis P. ; Li, Mary J. ; Figueroa-Feliciano, Enectali ; Finkbeiner, Fred M. ; Lindeman, Mark A. ; Stahle, Carl M. ; Stahle, Caroline K.

Author_Institution

NASA Goddard Space Flight Center, Greenbelt, MD, USA

Volume

11

Issue

1

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

755

Lastpage

758

Abstract

We present fabrication details of our Mo/Au X-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc´s of ~100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of X-ray microcalorimeters

Keywords

X-ray detection; gold; molybdenum; particle calorimetry; superconducting particle detectors; 100 mK; 3.3 keV; 3.7 eV; Constellation-X mission; Mo-Au; Mo/Au transition-edge sensors; X-ray microcalorimeters; X-ray spectrometry; fully functional multi-pixel array; high resolution spectrometers; superconducting Nb leads; Energy resolution; Fabrication; Gold; Silicon; Spectroscopy; Stress; Substrates; Superconducting device noise; Superconducting films; Temperature;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.919455

Filename

919455