Title :
Submillimeter superconducting integrated receivers: Fabrication and yield
Author :
Filippenko, Lyudmila V. ; Shitov, Sergey V. ; Dmitriev, Pavel N. ; Ermakov, Andrey B. ; Koshelets, Valery P. ; Gao, Jian-Rong
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
fDate :
3/1/2001 12:00:00 AM
Abstract :
Fabrication procedure and yield analysis of superconducting integrated receivers is reported. These chip receivers, apart from the quasi-optical SIS mixers, contain internal local oscillators and associated rf and dc interfaces. Due to both complexity and design requirements of the integrated circuit, certain restrictions are applied to the standard Nb/Al/AlxOy/Nb SNEAP process. To obtain accurate area for micron-size SIS junctions and thickness for multi-layer SiO2 insulation, a few solutions and modifications were developed. The possibility of transferring this fabrication process worldwide has been proven experimentally
Keywords :
submillimetre wave receivers; superconducting integrated circuits; superconductor-insulator-superconductor mixers; DC interface; Nb-Al-AlO-Nb; Nb/Al/AlxOy/Nb SNEAP process; RF interface; SIS junction; SiO2; fabrication; local oscillator; multilayer SiO2 insulation; quasi-optical SIS mixer; submillimeter superconducting integrated receiver; yield; Frequency; Josephson junctions; Local oscillators; Niobium; Optical device fabrication; Optical mixing; Optical pumping; Superconducting devices; Superconducting integrated circuits; Superconducting transmission lines;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
