Submillimeter superconducting integrated receivers: Fabrication and yield

Author

Filippenko, Lyudmila V. ; Shitov, Sergey V. ; Dmitriev, Pavel N. ; Ermakov, Andrey B. ; Koshelets, Valery P. ; Gao, Jian-Rong

Author_Institution

Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia

Volume

11

Issue

1

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

816

Lastpage

819

Abstract

Fabrication procedure and yield analysis of superconducting integrated receivers is reported. These chip receivers, apart from the quasi-optical SIS mixers, contain internal local oscillators and associated rf and dc interfaces. Due to both complexity and design requirements of the integrated circuit, certain restrictions are applied to the standard Nb/Al/Al_xO_y/Nb SNEAP process. To obtain accurate area for micron-size SIS junctions and thickness for multi-layer SiO₂ insulation, a few solutions and modifications were developed. The possibility of transferring this fabrication process worldwide has been proven experimentally

Keywords

submillimetre wave receivers; superconducting integrated circuits; superconductor-insulator-superconductor mixers; DC interface; Nb-Al-AlO-Nb; Nb/Al/Al_xO_y/Nb SNEAP process; RF interface; SIS junction; SiO₂; fabrication; local oscillator; multilayer SiO₂ insulation; quasi-optical SIS mixer; submillimeter superconducting integrated receiver; yield; Frequency; Josephson junctions; Local oscillators; Niobium; Optical device fabrication; Optical mixing; Optical pumping; Superconducting devices; Superconducting integrated circuits; Superconducting transmission lines;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.919469

Filename

919469