Fabrication of ultra-small and long intrinsic Josephson junctions on Bi-2212 single crystal whiskers

Author

Kim, Sang-Jae ; Latyshev, Yuri I. ; Yamashita, Tsutomu ; Kishida, Satosi

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

11

Issue

1

fYear

2001

fDate

3/1/2001 12:00:00 AM

Firstpage

948

Lastpage

951

Abstract

We report successful fabrication of small and long intrinsic Josephson junctions (IJJs) using Bi-2212 single crystal whiskers. The stacks of IJJs were made by 3-D focused-ion-beam (FIB) etching method. First a microbridge was patterned in a required junction width by etching into the substrate normal direction. By tilting the sample stage up to 90°, two grooves on the bridge were, then, etched from the lateral direction in order to create the required junction size. For in-plane area of 0.01 μm², Bi-2212 stacks showed no critical current. We also fabricated 3-D IJJs consisting of small and long stacks on the same chip

Keywords

Josephson effect; bismuth compounds; calcium compounds; focused ion beam technology; high-temperature superconductors; sputter etching; strontium compounds; superconducting microbridges; whiskers (crystal); 3D focused ion beam etching; Bi-2212 single crystal whisker; Bi₂Sr₂CaCu₂O; fabrication; intrinsic Josephson junction; superconducting microbridge; Bridges; Contacts; Critical current; Crystallization; Etching; Fabrication; Ion beams; Josephson junctions; Superconducting devices; Superconducting thin films;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.919502

Filename

919502