Title :
Optical raster-scanning displays based on surface-micromachined polysilicon mirrors
Author :
Hagelin, Paul M. ; Solgaard, Olav
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
We demonstrate high-resolution, raster-scanning display systems based on pairs of orthogonally scanning, surface-micromachined mirrors. The first mirror of the raster-scanning pair determines the line-scan rate of the display and is driven at its resonant frequency which is on the order of 4.7 kHz. The second mirror, driven at a frequency below its resonance and scanning orthogonally to the first mirror, determines the image refresh rate. Both mirrors have a maximum optical scanning angle of 15°. Single-chip and two-chip scanners are demonstrated. The resolution of the single-chip display, based on average pixel size, is 102×119 pixels. The curvature of the mirror surfaces are characterized and optically compensated to achieve this resolution
Keywords :
display devices; micro-optics; micromachining; mirrors; optical scanners; Si; microoptoelectromechanical system; optical raster scanning display; polysilicon micromirror; single-chip scanner; surface micromachining; two-chip scanner; Actuators; Biomedical optical imaging; Displays; High speed optical techniques; Micromirrors; Mirrors; Optical design; Optical modulation; Resonance; Resonant frequency;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.748107
