In situ observation and measurement of the SAW thin-film acoustoelectric effect

The thin-film acoustoelectric effect in SAW devices describes the interaction of electrical energy between a SAW in a piezoelectric medium and a thin film in the wave´s propagation path. The real-time observation of the thin-film acoustoelectric interaction is useful in the design and characterization of SAW sensors (i.e., temperature, humidity, viscosity, voltage, current, Hall effects, etc.). An in situ test fixture was designed to be mechanically, thermally, and electrically stable. Data acquisition software and an electron beam evaporation system were configured for real-time thin-film characterization during film growth. Data have been observed for more than 20 SAW devices and over a wide range of frequencies (i.e., 62 MHz to 1 GHz). The results suggest that the use of the in situ procedure yielded good agreement between theoretical predictions and the measured data, which demonstrates a method for the characterization of a SAW H₂-gas sensor in real-time.