DocumentCode
1477590
Title
Common path differential intensity and phase profilometer using time division multiplexing
Author
Somekh, M.G. ; Appel, R.K.
Volume
27
Issue
9
fYear
1991
fDate
4/25/1991 12:00:00 AM
Firstpage
719
Lastpage
720
Abstract
To measure surface topography in the subnanometre range a new approach to obtain simultaneous differential phase and intensity scans from an optical profilometer/microscope is described. The proposed configuration achieves these objectives by multiplexing two interferometers in time. Optimum differential intensity and phase response are achieved without the compromise associated with previous systems.
Keywords
light interferometers; surface topography measurement; common path differential intensity profilometer; differential intensity scans; differential phase scans; multiplexing two interferometers; optical profilometer/microscope; phase profilometer; simultaneous measurements; subnanometre range; time division multiplexing;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19910447
Filename
74880
Link To Document