Title :
High-quality Y-Ba-Cu-O thin films by PLD-ready for market applications
Author :
Lorenz, Michael ; Hochmuth, Holger ; Matusch, D. ; Kusunoki, Masanobu ; Svetchnikov, Vasily L. ; Riede, Volker ; Stanca, Ioan ; Kastner, G. ; Hesse, Dietrich
Author_Institution :
Fac. of Phys. & Geosci., Leipzig Univ., Germany
fDate :
3/1/2001 12:00:00 AM
Abstract :
Large-area pulsed laser deposition (PLD) has reached a state in terms of film quality and reproducibility which makes possible now real market applications of PLD-YBa2Cu3O7-δ (YBCO) thin films on both sides of R-plane sapphire substrates as HTSC devices in satellite and mobile communication systems. Bandpass filters optimized from PLD-YBCO thin films presently fulfil the requirements of the main national companies which are active in future communication techniques. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 3-inch diameter Ag-doped YBCO thin films. With the experience of more than 1,000 double-sided 3-inch diam. films a high degree of homogeneity and reproducibility of jc and Rs is reached. The extension up to 8-inch substrate diameter will increase the productivity of the flexible PLD technique considerably
Keywords :
band-pass filters; barium compounds; critical current density (superconductivity); high-temperature superconductors; microwave filters; pulsed laser deposition; silver; superconducting filters; superconducting junction devices; superconducting microwave devices; superconducting thin films; surface conductivity; yttrium compounds; 3 in; Ag-doped YBCO thin films; Al2O3; HTSC devices; PLD; R-plane sapphire substrates; Rs; YBCO; YBa2Cu3O7-δ; YBa2Cu3O7:Ag; bandpass filters; communication techniques; film quality; fixed laser plume; high-quality Y-Ba-Cu-O thin films; homogeneity; jc; large-area pulsed laser deposition; reproducibility; rotating substrate; Artificial satellites; Mobile communication; Optical pulses; Pulsed laser deposition; Reproducibility of results; Sputtering; Substrates; Thin film devices; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on