Author :
Avset, B.S. ; Evensen, L. ; Chabaud, V. ; Dijkstra, H. ; Horisberger, R. ; Hubbeling, L. ; Maehlum, G. ; Peisert, A. ; Roditi, I. ; Weilhammer, P. ; Czermak, A. ; Jalocha, P. ; Turala, M. ; Bambade, Ph ; Dulinski, W. ; Turchetta, R. ; Schaeffer, M. ; Batt
Abstract :
A silicon microstrip detector has been developed with 50-μm-pitch strips on both the p- and n-side, using the principle of capacitive coupling between p+ diode strips (respectively, n + strips) and the metallization strips which connect to the front-end preamplifiers. The detector is biased on both sides via polysilicon resistors connecting each p+ or n+ line to a common bias bus. To allow ohmic separation at the n-side, the accumulation layer of electrons has to be disrupted between the n+ strips. This has been achieved in three different ways: by separate polysilicon lines on thick oxide between two adjacent n+ lines to break the conducting accumulation layer by externally induced field depletion or by using the metal lines of the n+ strips on thick oxide or on thin oxide. Results on 20×20-mm2 test devices are presented. A preliminary analysis of the spatial resolution gives σ=16 μm on both sides. These results demonstrate that double-sided readout Si strip detectors can be used for experiments where spatial resolution in the 10 μm range is needed
Keywords :
position sensitive particle detectors; semiconductor counters; 16 micron; 20 micron; 50 micron; Si microstrip detector; capacitive coupling; double-sided readout; field depletion; metallization strips; n+ strips; ohmic separation; p+ strips; polysilicon resistors; spatial resolution; thick oxide; thin oxide; Detectors; Diodes; Joining processes; Metallization; Microstrip; Preamplifiers; Resistors; Silicon; Spatial resolution; Strips;