Development of a Cu/Low- $k$ Stack Die Fine Pitch Ball Grid Array (FBGA) Package for System in Package Applications

Consumers´ demands have driven the industry toward devices and packages with low cost, high performance, and multiple functions. Stacking two or more chips into one package becomes a popular choice. In this paper, the development of a three-die stack fine pitch ball grid array package is reported. A 65 nm Cu/low-k die is used as the bottom die in the package to increase the speed of the chip with multilayer interconnect structures. Compared to the conventional dielectrics, low-k materials are softer and less resistant to thermal-mechanical stress induced by packaging processes. In this paper, finite element analysis is performed to minimize the stress in low-k layers and to address the low-k delamination issue. In the dicing evaluation, comparison among straight cut, bevel cut and two-step cut was performed in terms of die strength and chipping results. It is found that the bevel cut dicing method is the best dicing method. The die attach process (especially wire embedded film process) is optimized to ensure that no voids are present in the die attach materials after the bonding process. The ultralow loop wire bonding process (50 μm) is also well established. The maximum wire sweep for all test vehicles is less than 10% in the molding process. Finally, all samples for test vehicle 1 were shown to have successfully passed JEDEC component level tests such as thermal cycling for 1000 cycles (-40°C to 125°C) and high temperature storage (HTS at 150°C) for 1000 h.