Title :
Electric impedance spectroscopy using microchannels with integrated metal electrodes
Author :
Ayliffe, H. Edward ; Frazier, A. Bruno ; Rabbitt, R.D.
Author_Institution :
Dept. of Bioeng., Utah Univ., Salt Lake City, UT, USA
fDate :
3/1/1999 12:00:00 AM
Abstract :
Microelectric impedance measurement systems containing microchannels with integrated gold electrodes were fabricated to enable EI measurements of femtoliter (10-15) volumes of liquid or gas. The microinstruments were characterized using samples of air, partially deionized water, and saline solutions with various ionic concentrations over the frequency range of 100 Hz to 2 MHz. Resulting spectral patterns varied systemically as a function of ionic concentration. In addition to industrial sensing applications, this technology may prove to be beneficial in monitoring microsystems utilizing on-chip fluid chemistry, measuring the dielectric dispersion of polymer solutions, and determining the electrical properties of isolated biological materials
Keywords :
biosensors; electric impedance measurement; microelectrodes; microsensors; 100 Hz to 2 MHz; Au; air; biological cells; deionized water; electric impedance spectroscopy; integrated metal electrode; ionic concentration; microchannel; microelectric impedance measurement system; microinstrument; saline solution; Chemical technology; Electrochemical impedance spectroscopy; Electrodes; Frequency; Gold; Impedance measurement; Isolation technology; Microchannel; Plastics industry; Volume measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
