• DocumentCode
    1480539
  • Title

    Torque evaluation of a LIGA fabricated electrostatic micromotor

  • Author

    Samper, V.D. ; Sangster, A.J. ; Reuben, R.L. ; Wallrabe, U.

  • Author_Institution
    Inst. of Microelectron., Singapore
  • Volume
    8
  • Issue
    1
  • fYear
    1999
  • fDate
    3/1/1999 12:00:00 AM
  • Firstpage
    115
  • Lastpage
    123
  • Abstract
    The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared
  • Keywords
    LIGA; electrostatic motors; finite element analysis; machine theory; rolling friction; sliding friction; torque; LIGA fabrication; dynamic model; electric field; electrostatic micromotor; finite element analysis; rolling friction; sliding friction; torque; wobble motor; Contact resistance; Electrostatic analysis; Finite element methods; Friction; Impedance; Micromotors; Rotors; Shafts; Stators; Torque measurement;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/84.749410
  • Filename
    749410
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1480539