Design of Micromachined Vibratory Gyroscope With Two Degree-of-Freedom Drive-Mode and Sense-Mode

Author

Wang, Wei ; Lv, Xiaoyong ; Sun, Feng

Author_Institution

Harbin Eng. Univ., Harbin, China

Volume

12

Issue

7

fYear

2012

fDate

7/1/2012 12:00:00 AM

Firstpage

2460

Lastpage

2464

Abstract

In this paper, a novel micromachined vibratory gyroscope is proposed, where a two degree-of-freedom (2-DOF) architecture with two masses and three springs is utilized in both drive-mode and sense-mode. The 2-DOF dynamic structure provides the inherently robustness of both modes against structural and environmental variations. The proposed gyroscope demonstrates drive-mode 3-dB bandwidth of 190 Hz and sense-mode 3-dB bandwidth of 300 Hz at the operational frequency 5.0 kHz. The simulation results confirmed that the resonant frequency and bandwidth of the drive-mode are highly matched with those of sense-mode in the region of 4.90-5.09 kHz. So the gyroscope can be operated robustly in the region of 4.90-5.09 kHz. The proposed device can also be started quickly and suppress the pulse noise.

Keywords

gyroscopes; micromachining; microsensors; vibrations; 2-DOF dynamic structure; bandwidth 190 Hz; bandwidth 300 Hz; degree-of-freedom drive-mode; environmental variations; frequency 4.9 kHz to 5.09 kHz; micromachined vibratory gyroscope design; pulse noise suppression; resonant frequency; sense-mode; structural variations; Bandwidth; Equations; Gyroscopes; Mathematical model; Resonant frequency; Robustness; Sensors; 2-DOF; drive-mode; micromachined vibratory gyroscope; wide bandwidth;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2012.2192497

Filename

6176194