Title :
Fabrication of periodically reversed domain structure for SHG in LiNbO3 by direct electron beam lithography at room temperature
Author :
Yamada, M. ; Kishima, K.
Author_Institution :
Sony Corp., Tokyo, Japan
fDate :
5/9/1991 12:00:00 AM
Abstract :
For the first time, the fabrication of a periodically reversed domain structure for LiNbO3 has been achieved at room temperature. The domain boundary is perpendicular to the positive c-face and is very deep which is advantageous for quasi-phase-matching SHG.
Keywords :
electron beam lithography; integrated optics; lithium compounds; optical harmonic generation; optical workshop techniques; LiNbO 3; OHG; direct electron beam lithography; fabrication; nonlinear optics; periodically reversed domain structure; quasi-phase-matching SHG; room temperature;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19910519
