• DocumentCode
    1480629
  • Title

    Fabrication of periodically reversed domain structure for SHG in LiNbO3 by direct electron beam lithography at room temperature

  • Author

    Yamada, M. ; Kishima, K.

  • Author_Institution
    Sony Corp., Tokyo, Japan
  • Volume
    27
  • Issue
    10
  • fYear
    1991
  • fDate
    5/9/1991 12:00:00 AM
  • Firstpage
    828
  • Lastpage
    829
  • Abstract
    For the first time, the fabrication of a periodically reversed domain structure for LiNbO3 has been achieved at room temperature. The domain boundary is perpendicular to the positive c-face and is very deep which is advantageous for quasi-phase-matching SHG.
  • Keywords
    electron beam lithography; integrated optics; lithium compounds; optical harmonic generation; optical workshop techniques; LiNbO 3; OHG; direct electron beam lithography; fabrication; nonlinear optics; periodically reversed domain structure; quasi-phase-matching SHG; room temperature;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19910519
  • Filename
    74952
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1480629