• DocumentCode
    1481036
  • Title

    Extended Quantum Correction Model Applied to Six-Band {\\bf k}\\cdot {\\bf p} Valence Bands Near Silicon/Oxide Interfaces

  • Author

    Penzin, Oleg ; Paasch, Gernot ; Heinz, Frederik O. ; Smith, Lee

  • Author_Institution
    Synopsys Inc., Hillsboro, OR, USA
  • Volume
    58
  • Issue
    6
  • fYear
    2011
  • fDate
    6/1/2011 12:00:00 AM
  • Firstpage
    1614
  • Lastpage
    1619
  • Abstract
    The modified local density approximation (MLDA) was developed to describe quantum corrections due to size quantization near a semiconductor-oxide interface for parabolic ellipsoidal bands. In this paper, we propose an extended MLDA model in order to consider arbitrary band structures. The results are compared with the original MLDA model and to self-consistent Poisson-Schrödinger solutions using both constant effective mass and confined six-band Hamiltonians. The extended MLDA model is verified for three major surface orientations and high stress conditions.
  • Keywords
    MOSFET; Poisson distribution; Schrodinger equation; band structure; density functional theory; effective mass; interface structure; silicon; technology CAD (electronics); valence bands; Si; arbitrary band structures; confined six-band Hamiltonians; effective mass; extended MLDA model; extended quantum correction model; high stress conditions; modified local density approximation; parabolic ellipsoidal bands; quantum corrections; self-consistent Poisson-Schrodinger solutions; semiconductor-oxide interface; silicon-oxide interfaces; six-band valence bands; surface orientations; Computational modeling; Equations; Logic gates; Mathematical model; Numerical models; Semiconductor process modeling; Stress; Hole quantization; metal–oxide–semiconductor field-effect transistor (MOSFET); modified local density approximation (MLDA); stress; technology computer-aided design (TCAD);
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2011.2122264
  • Filename
    5739109