DocumentCode
1481036
Title
Extended Quantum Correction Model Applied to Six-Band
Valence Bands Near Silicon/Oxide Interfaces
Author
Penzin, Oleg ; Paasch, Gernot ; Heinz, Frederik O. ; Smith, Lee
Author_Institution
Synopsys Inc., Hillsboro, OR, USA
Volume
58
Issue
6
fYear
2011
fDate
6/1/2011 12:00:00 AM
Firstpage
1614
Lastpage
1619
Abstract
The modified local density approximation (MLDA) was developed to describe quantum corrections due to size quantization near a semiconductor-oxide interface for parabolic ellipsoidal bands. In this paper, we propose an extended MLDA model in order to consider arbitrary band structures. The results are compared with the original MLDA model and to self-consistent Poisson-Schrödinger solutions using both constant effective mass and confined six-band Hamiltonians. The extended MLDA model is verified for three major surface orientations and high stress conditions.
Keywords
MOSFET; Poisson distribution; Schrodinger equation; band structure; density functional theory; effective mass; interface structure; silicon; technology CAD (electronics); valence bands; Si; arbitrary band structures; confined six-band Hamiltonians; effective mass; extended MLDA model; extended quantum correction model; high stress conditions; modified local density approximation; parabolic ellipsoidal bands; quantum corrections; self-consistent Poisson-Schrodinger solutions; semiconductor-oxide interface; silicon-oxide interfaces; six-band valence bands; surface orientations; Computational modeling; Equations; Logic gates; Mathematical model; Numerical models; Semiconductor process modeling; Stress; Hole quantization; metal–oxide–semiconductor field-effect transistor (MOSFET); modified local density approximation (MLDA); stress; technology computer-aided design (TCAD);
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2011.2122264
Filename
5739109
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