Title :
Vibration characteristics of besocke-style scanning systems
Author :
Zhang, Hui ; Zhang, Shu-yi ; Chen, Zhao-Jiang ; Fan, Li
Author_Institution :
Lab. of Modern Acoust., Nanjing Univ., Nanjing, China
fDate :
5/1/2010 12:00:00 AM
Abstract :
A vibration model of Besocke-style scanners is given based on Timoshenko beam theory. The model is applied to investigate the flexural vibration characteristics of piezotubes in the scanners, in which the effects of affiliated components of the piezo-tubes are considered. The calculated results show that several factors in addition to the piezo-tubes themselves influence the flexural vibration frequencies of the scanners. An example is the balls which support the piezo-tubes. These play important roles in influencing the flexural vibration characteristics of the scanners and can result in high-flexural resonance frequencies. The local resonance of the scanner disk can also influence the flexural vibration characteristics of the piezo-tubes. Finally, we show that the effects of the local resonance on the vibration characteristics of the scanners can be decreased or eliminated by improving the rigidity of connection between the scanner disk and the piezo-tube.
Keywords :
piezoelectric devices; scanning probe microscopy; shear modulus; vibrations; Besocke-style scanners; Besocke-style scanning systems; Timoshenko beam theory; flexural vibration characteristics; flexural vibration frequencies; high-flexural resonance frequencies; piezotubes; rigidity; vibration model; Resonance; Resonant frequency;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2010.1525