Rayleigh and shear horizontal surface acoustic properties of (100) ZnO films on silicon

Author

Wu, Sean ; Lin, Zhi-Xun ; Ro, Ruyen ; Lee, Maw-Shung

Author_Institution

Dept. of Electron. Eng. & Comput. Sci., Tung-Fang Inst. of Technol., Hunei Shiang, Taiwan

Volume

57

Issue

5

fYear

2010

fDate

5/1/2010 12:00:00 AM

Firstpage

1237

Lastpage

1239

Abstract

(100) ZnO films on silicon will excite Rayleigh SAWs along the z-axis and shear horizontal (SH) SAWs along the y-axis. Rayleigh SAW modes of (100) ZnO films on silicon have smaller film thickness ratios, higher phase velocities, and larger electromechanical coupling coefficient (K²) than the those of (002) ZnO films on silicon. This is special for Rayleigh mode 1, where the K² curve shows a maximum value of 3.37% at h/?? = 0.28 and the velocity is 5258 m/s. This is special for SH mode 0, where the K² curve shows a maximum value of 3.3% at h/?? = 0.28 and the velocity is 3242 m/s.

Keywords

II-VI semiconductors; Rayleigh waves; crystallographic shear; electromechanical effects; semiconductor thin films; surface acoustic waves; wide band gap semiconductors; zinc compounds; Rayleigh SAW mode; Rayleigh surface acoustic property; Si; ZnO; electromechanical coupling coefficient; film thickness ratio; phase velocity; shear horizontal surface acoustic property; silicon; Sawing machines; Semiconductor films; Silicon; Surface acoustic waves; Zinc oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2010.1537

Filename

5456274