Title :
Inline Measurement of Adhesion Force Using Electrostatic Actuation and Capacitive Readout
Author :
Shavezipur, M. ; Gou, W. ; Fisch, M. ; Carraro, C. ; Maboudian, R.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
A microinstrument with electrostatic actuation and capacitive readout for the measurement of adhesion force is introduced that can be used in packaged systems for the in-line characterization and monitoring of fabricated devices. The test results for different apparent contact areas obtained using these devices are in agreement with previously reported values for adhesion force obtained via optical readout and display a weak correlation between the apparent contact area and the adhesion force.
Keywords :
adhesion; electrostatic actuators; force measurement; adhesion force measurement; apparent contact area; capacitive readout; contact areas; electrostatic actuation; in-line characterization; microinstrument; optical readout; system packaging; Adhesives; Electrodes; Electrostatic measurements; Electrostatics; Force; Force measurement; Surface treatment; Adhesion force; capacitive readout; electrostatic actuation; microelectromechanical systems (MEMS) reliability;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2190715
