DocumentCode
1482492
Title
Batch fabricated long throw bi-stable electromagnetic micro-actuator
Author
Dai, X.H. ; Ding, Guoru ; Zhao, X.L.
Author_Institution
State Key Lab. of Micro/Nano Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai, China
Volume
46
Issue
9
fYear
2010
Firstpage
638
Lastpage
639
Abstract
A long throw bi-stable electromagnetic micro-actuator is presented. Its configuration was easy to be batch fabricated. According to the experiment results, when the actuator was applied with a 5 V voltage pulse, the bi-stable switch was realised and the output displacement was larger than 150 m. Its overall size is 6 ?? 6 ?? 3 mm. The device structure, principle and fabrication method are also presented.
Keywords
electromagnetic actuators; microactuators; microfabrication; microswitches; batch fabricated microactuator; bistable switch; fabrication method; long throw bistable electromagnetic microactuator; voltage 5 V;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2010.2109
Filename
5457399
Link To Document