DocumentCode
1482911
Title
Cut to the ground
Author
Davies, D.
Author_Institution
IET, Stevenage, UK
Volume
48
Issue
7
fYear
2012
Firstpage
352
Lastpage
352
Abstract
Researchers in Korea have presented a simple physical-dicing-based method for backside source grounding of high electron mobility transistors through 447 m-thick SiC substrate without complex and costly pre-thinning treatments.
Keywords
high electron mobility transistors; silicon compounds; HEMT; SiC; backside source grounding; high electron mobility transistors; physical-dicing-based method; size 447 mum;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2012.0878
Filename
6177759
Link To Document