• DocumentCode
    1483315
  • Title

    The effects of underlayer NiFeX on the magnetic properties of CoPt films

  • Author

    Xue, Song S. ; Ryan, Patrick J. ; Dolejsi, James F.

  • Author_Institution
    Seagate Technol., Minneapolis, MN, USA
  • Volume
    33
  • Issue
    5
  • fYear
    1997
  • fDate
    9/1/1997 12:00:00 AM
  • Firstpage
    2908
  • Lastpage
    2910
  • Abstract
    The effects of soft magnetic underlayer, NiFeX, on the magnetic properties of CoPt films has been studied as a function of substrate bias and Ar pressure during the NiFeX deposition and sputter etch time prior to the CoPt film deposition. It is concluded that the FCC (111) texture of NiFeX plays a dominant role in the c-axis orientation of CoPt films, Applying substrate bias or using P-Ta as an underlayer, the FCC (111) texture of NiFeX films can be greatly enhanced. Applying no substrate bias and sputtering at high Ar pressure, the FCC (111) texture of NiPeX films can be suppressed. As a consequence, the anisotropy of the CoPt films can be made either in-plane or perpendicular depending on the crystallinity of the NiPeX films. It is also found that a strong ferromagnetic exchange field between NiPeX and CoPt films favors the growth of CoPt films with c-axis in-plane, with a typical symptom of high in-plane moment thickness product and low remnant coercivity
  • Keywords
    cobalt alloys; coercive force; exchange interactions (electron); ferromagnetic materials; iron alloys; magnetic anisotropy; magnetic thin films; nickel alloys; platinum alloys; remanence; soft magnetic materials; sputter etching; sputtered coatings; Ar pressure; CoPt; CoPt films; FCC (111) texture; c-axis orientation; crystallinity; high in-plane moment thickness product; low remnant coercivity; magnetic properties; soft magnetic underlayer; sputter etch time; strong ferromagnetic exchange field; substrate bias; underlayer NiFeX; Argon; FCC; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Soft magnetic materials; Sputter etching; Sputtering; Substrates;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.617794
  • Filename
    617794