Title :
AFM observation of surface acoustic waves emitted from single symmetric SAW transducers
Author :
Hesjedal, Thorsten ; Behme, Gerd
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
fDate :
5/1/2001 12:00:00 AM
Abstract :
We report the first experimental observation of surface acoustic waves (SAWs) launched from a single symmetric SAW transducer, employing scanning acoustic force microscopy (SAFM). SAFM is a simple technique for the imaging of complex interdigital transducer (IDT) radiation patterns with nanometer lateral resolution. We demonstrate submicron lateral resolution and high sensitivity by investigating a single excitation element on a weakly coupling substrate (GaAs), visualizing the launched wave and second-order effects.
Keywords :
atomic force microscopy; interdigital transducers; surface acoustic wave transducers; AFM observation; GaAs; SAFM; complex interdigital transducer; excitation element; launched wave; nanometer lateral resolution; radiation patterns; scanning acoustic force microscopy; second-order effects; single symmetric SAW transducers; submicron lateral resolution; surface acoustic waves; weakly coupling substrate; Acoustic emission; Acoustic imaging; Acoustic transducers; Acoustic waves; Atomic force microscopy; Gallium arsenide; High-resolution imaging; Image resolution; Sawing machines; Surface acoustic waves;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
