Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

Author

Wei Chen ; Beidaghi, M. ; Penmatsa, V. ; Bechtold, K. ; Kumari, L. ; Li, W.Z. ; Chunlei Wang

Author_Institution

Dept. of Mech. & Mater. Eng., Florida Int. Univ., Miami, FL, USA

Volume

9

Issue

6

fYear

2010

Firstpage

734

Lastpage

740

Abstract

Carbon nanotubes (CNTs)/carbon microelectromechanical systems (C-MEMS) composites were fabricated as electrode materials for on-chip supercapacitors. By using photolithography and pyrolysis process, 3-D C-MEMS architectures were prepared. The iron catalyst particles were conformally coated on the C-MEMS by electrostatic spray deposition (ESD) and CNTs were synthesized on the surfaces of C-MEMS by catalytic CVD method. The CNT/C-MEMS composites exhibited higher specific capacitance than C-MEMS. Furthermore, the composites with more homogeneous CNTs showed better capacitance. After treatment of oxygen plasma, the specific capacitance of the composite increased due to the contribution of oxygen functional groups.

Keywords

carbon nanotubes; chemical vapour deposition; micromechanical devices; nanocomposites; photolithography; plasma materials processing; pyrolysis; spray coating techniques; supercapacitors; 3D C-MEMS architectures; C; C-MEMS composites; carbon microelectromechanical systems; carbon nanotubes; catalytic CVD method; electrode materials; electrostatic spray deposition; iron catalyst particles; on-chip supercapacitors; oxygen plasma treatment; photolithography; pyrolysis process; Capacitance; Carbon nanotubes; Composite materials; Electrodes; Iron; Lithography; Microelectromechanical systems; Organic materials; Supercapacitors; System-on-a-chip; Carbon microelectromechanical systems (C-MEMS); carbon nanotubes (CNTs); on-chip supercapacitors;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2010.2049500

Filename

5458084