Title :
Dispersed-oxide seedlayer induced isotropic media
Author :
Teng, E. ; Nguyen, P. ; Wang, P. ; Parker, D. ; Eltoukhy, A.
Author_Institution :
StorMedia Inc., Santa Clara, CA, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
A special Cr target with dispersed-oxide matrix was sputtered as the seedlayer to manufacture an isotropic media with high coercivity and squareness. The dispersed-oxide seedlayer was sputtered on a NiP/Al substrate, then the multilayer films of Cr/CoCrPtTa/C were deposited sequentially by an in-line DC/RF magnetron sputtering system. The orientation ratio (OR) was found to be about one. The media noise and non-linear transition shift (NLTS) of such isotropic media were found much better than those of the oriented media at high recording densities. Magnetic force microscope images (MPM) also showed a clear and sharp bit transition pattern of the isotropic media with dispersed-oxide seedlayer. The film microstructure and crystalline orientation difference between the disks with and without dispersed-oxide seedlayer were examined by using the X-ray diffraction (XRD) and Grazing-incidence X-ray diffraction (GIXRD) techniques
Keywords :
X-ray diffraction; carbon; chromium; chromium alloys; cobalt alloys; coercive force; ferromagnetic materials; hard discs; magnetic force microscopy; magnetic multilayers; magnetic recording noise; platinum alloys; sputter deposition; tantalum alloys; Cr-CoCrPtTa-C; NiP-Al; X-ray diffraction; bit transition pattern; coercivity; crystalline orientation; disks; dispersed-oxide seedlayer; grazing-incidence X-ray diffraction; in-line DC/RF magnetron sputtering; isotropic media; magnetic force microscope images; media noise; nonlinear transition shift; orientation ratio; recording densities; squareness; Chromium; Coercive force; Magnetic multilayers; Magnetic noise; Manufacturing; Radio frequency; Sputtering; Substrates; X-ray diffraction; X-ray imaging;
Journal_Title :
Magnetics, IEEE Transactions on
