Dispersed-oxide seedlayer induced isotropic media

Author

Teng, E. ; Nguyen, P. ; Wang, P. ; Parker, D. ; Eltoukhy, A.

Author_Institution

StorMedia Inc., Santa Clara, CA, USA

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

2947

Lastpage

2949

Abstract

A special Cr target with dispersed-oxide matrix was sputtered as the seedlayer to manufacture an isotropic media with high coercivity and squareness. The dispersed-oxide seedlayer was sputtered on a NiP/Al substrate, then the multilayer films of Cr/CoCrPtTa/C were deposited sequentially by an in-line DC/RF magnetron sputtering system. The orientation ratio (OR) was found to be about one. The media noise and non-linear transition shift (NLTS) of such isotropic media were found much better than those of the oriented media at high recording densities. Magnetic force microscope images (MPM) also showed a clear and sharp bit transition pattern of the isotropic media with dispersed-oxide seedlayer. The film microstructure and crystalline orientation difference between the disks with and without dispersed-oxide seedlayer were examined by using the X-ray diffraction (XRD) and Grazing-incidence X-ray diffraction (GIXRD) techniques

Keywords

X-ray diffraction; carbon; chromium; chromium alloys; cobalt alloys; coercive force; ferromagnetic materials; hard discs; magnetic force microscopy; magnetic multilayers; magnetic recording noise; platinum alloys; sputter deposition; tantalum alloys; Cr-CoCrPtTa-C; NiP-Al; X-ray diffraction; bit transition pattern; coercivity; crystalline orientation; disks; dispersed-oxide seedlayer; grazing-incidence X-ray diffraction; in-line DC/RF magnetron sputtering; isotropic media; magnetic force microscope images; media noise; nonlinear transition shift; orientation ratio; recording densities; squareness; Chromium; Coercive force; Magnetic multilayers; Magnetic noise; Manufacturing; Radio frequency; Sputtering; Substrates; X-ray diffraction; X-ray imaging;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.617806

Filename

617806