DocumentCode :
1484073
Title :
Lateral resonant tunneling transistors employing field-induced quantum wells and barriers
Author :
Chou, Stephen Y. ; Allee, David R. ; Pease, R. Fabian ; Harris, James S., Jr.
Author_Institution :
Stanford Univ., CA, USA
Volume :
79
Issue :
8
fYear :
1991
fDate :
8/1/1991 12:00:00 AM
Firstpage :
1131
Lastpage :
1139
Abstract :
The authors describe some preliminary experimental results of quantum-effect modulation-doped field-effect transistors (MODFETs) with a variety of nanometer gate geometries. The gate geometries were such that various quantum wells and barriers were formed in the channel of the MODFETs through the field effect imposed by the novel gate structures, and the transport of the electrons was affected by resonant tunneling. The devices were fabricated using a combination of molecular beam epitaxy and electron beam lithography. Electrical measurements of the devices at 4.2 K showed resonant tunneling effects and, in particular, showed that resonant tunneling is more pronounced for a system of quantum wells confined in three dimensions than in two. For these quantum effects to be appreciable at practical temperatures, about 77 K, the feature size of the gate geometries should be smaller than 50 nm
Keywords :
electron beam lithography; high electron mobility transistors; molecular beam epitaxial growth; quantum interference devices; resonant tunnelling devices; semiconductor quantum wells; 4.2 K; 50 nm; 77 K; MODFETs; electron beam lithography; field-effect transistors; field-induced quantum wells; lateral resonant tunnelling transistors; modulation-doped; molecular beam epitaxy; nanometer gate geometries; quantum-effect; Electric variables measurement; Electron beams; Epitaxial layers; FETs; Geometry; HEMTs; Lithography; MODFETs; Molecular beam epitaxial growth; Resonant tunneling devices;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/5.92072
Filename :
92072
Link To Document :
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