Title :
Two-dimensional magnetic microsensor with on-chip signal processing for contactless angle measurement
Author :
Haberli, A. ; Schneider, Michael ; Malcovati, Piero ; Castagnetti, Ruggero ; Maloberti, Franco ; Baltes, Henry
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
fDate :
12/1/1996 12:00:00 AM
Abstract :
The reported CMOS microsystem is the key element for accurate angle measurements. In combination with a permanent magnet, it is used for various wear free angular positioning control systems for automotive and industrial applications covering the full 360° range. The integrated system includes a two-dimensional (2-D) magnetic microsensor (30×30 μm2 active area), offset compensation, and signal conditioning circuitry. A novel approach for the angle calculation is presented using an on-board incremental ADC. A bitstream representing the angular position of the applied permanent magnet is provided at the system output. The system achieves a 1° angular resolution with 9 mW power consumption and a permanent magnet of 100 mT. The chip is fabricated in a generic 2-μm, double-poly, double-metal CMOS process and covers an area of 2.6×4.1 mm2
Keywords :
CMOS integrated circuits; analogue-digital conversion; angular measurement; error compensation; magnetic sensors; signal processing equipment; spatial variables measurement; 100 mT; 2 micron; 9 mW; CMOS microsystem; contactless angle measurement; double-poly double-metal CMOS process; offset compensation; on-board incremental ADC; onchip signal processing; permanent magnet; signal conditioning circuitry; two-dimensional magnetic microsensor; Automotive engineering; Control systems; Electrical equipment industry; Goniometers; Industrial control; Magnetic circuits; Micromagnetics; Permanent magnets; Signal processing; Two dimensional displays;
Journal_Title :
Solid-State Circuits, IEEE Journal of
