Fabrication of 4 x 4 tapered MMI coupler with large cross section

Author

Wei, Hongzhen ; Yu, Jinzhong ; Liu, Zhongli ; Zhang, Xiaofeng ; Shi, Wei ; Fang, Changshui

Author_Institution

Inst. of Semicond., Acad. Sinica, Beijing, China

Volume

13

Issue

5

fYear

2001

fDate

5/1/2001 12:00:00 AM

Firstpage

466

Lastpage

468

Abstract

MMI coupler with large cross section has low coupling loss between the device and fiber. However, large chip area is required. Recently proposed N/spl times/N tapered MMI coupler shows a substantial reduction in device geometry. No such kind of devices with N>2 has yet been realized up to now. The authors have demonstrated a 4/spl times/4 parabolically tapered MMI coupler with large cross section that can match the SM fiber in silicon-on-insulator (SOI) technology. The device exhibits a minimum uniformity of 0.36 dB and excess loss of 3.7 dB. It represents a key component for realization of MMI-based silicon integrated optical circuit technology.

Keywords

integrated optics; integrated optoelectronics; optical couplers; optical fabrication; optical losses; silicon-on-insulator; 3.7 dB; 4/spl times/4 parabolically tapered MMI coupler; 4/spl times/4 tapered MMI coupler fabrication; MMI-based silicon integrated optical circuit technology; SOI technology; SiO/sub 2/-Si; device geometry; excess loss; large chip area; large cross section; low coupling loss; silicon-on-insulator; tapered MMI coupler; Coupling circuits; Fabrication; Geometry; Integrated circuit technology; Integrated optics; Optical fiber couplers; Optical fiber devices; Optical losses; Samarium; Silicon on insulator technology;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.920753

Filename

920753