Title :
Fabrication of 4 x 4 tapered MMI coupler with large cross section
Author :
Wei, Hongzhen ; Yu, Jinzhong ; Liu, Zhongli ; Zhang, Xiaofeng ; Shi, Wei ; Fang, Changshui
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
fDate :
5/1/2001 12:00:00 AM
Abstract :
MMI coupler with large cross section has low coupling loss between the device and fiber. However, large chip area is required. Recently proposed N/spl times/N tapered MMI coupler shows a substantial reduction in device geometry. No such kind of devices with N>2 has yet been realized up to now. The authors have demonstrated a 4/spl times/4 parabolically tapered MMI coupler with large cross section that can match the SM fiber in silicon-on-insulator (SOI) technology. The device exhibits a minimum uniformity of 0.36 dB and excess loss of 3.7 dB. It represents a key component for realization of MMI-based silicon integrated optical circuit technology.
Keywords :
integrated optics; integrated optoelectronics; optical couplers; optical fabrication; optical losses; silicon-on-insulator; 3.7 dB; 4/spl times/4 parabolically tapered MMI coupler; 4/spl times/4 tapered MMI coupler fabrication; MMI-based silicon integrated optical circuit technology; SOI technology; SiO/sub 2/-Si; device geometry; excess loss; large chip area; large cross section; low coupling loss; silicon-on-insulator; tapered MMI coupler; Coupling circuits; Fabrication; Geometry; Integrated circuit technology; Integrated optics; Optical fiber couplers; Optical fiber devices; Optical losses; Samarium; Silicon on insulator technology;
Journal_Title :
Photonics Technology Letters, IEEE
