Title :
Introduction to the Special Section on Advanced Process Control
Author :
Moyne, James ; Patel, Nital S.
Author_Institution :
Applied Materials Inc., Canton, MI, USA
fDate :
5/1/2010 12:00:00 AM
Abstract :
The nine papers selected for the current special section reflect the continued maturation of advanced process control (APC) research and its movement into new application and technology areas.
Keywords :
Control systems; Fault detection; Metrology; Optimization methods; Process control; Productivity; Sampling methods; Semiconductor process modeling; Size control; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2010.2046115
