Title :
Introducing a Unified PCA Algorithm for Model Size Reduction
Author :
Good, Richard P. ; Kost, Daniel ; Cherry, Gregory A.
Author_Institution :
GLOBALFOUNDRIES, Austin, TX, USA
fDate :
5/1/2010 12:00:00 AM
Abstract :
Principal component analysis (PCA) is a technique commonly used for fault detection and classification (FDC) in highly automated manufacturing. Because PCA model building and adaptation rely on eigenvalue decomposition of parameter covariance matrices, the computational effort scales cubically with the number of input variables. As PCA-based FDC applications monitor systems with more variables, or trace data with faster sampling rates, the size of the PCA problems can grow faster than the FDC system infrastructure will allow. This paper introduces an algorithm that greatly reduces the overall size of the PCA problem by breaking the analysis of a large number of variables into multiple analyses of smaller uncorrelated blocks of variables. Summary statistics from these subanalyses are then combined into results that are comparable to what is generated from the complete PCA of all variables together.
Keywords :
covariance matrices; eigenvalues and eigenfunctions; fault diagnosis; manufacturing processes; principal component analysis; eigenvalue decomposition; fault detection and classification; model size reduction; multiple analyses; parameter covariance matrices; principal component analysis; unified PCA algorithm; Adaptation model; Algorithm design and analysis; Covariance matrix; Eigenvalues and eigenfunctions; Fault detection; Input variables; Manufacturing automation; Monitoring; Principal component analysis; Sampling methods; Combined index; computation time; fault detection; large scale systems; multivariate statistical process control (MSPC); principal component analysis (PCA); recursive PCA;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2010.2041263