• DocumentCode
    1484447
  • Title

    The technology of semiconductor materials preparation

  • Author

    Brice, J.C. ; Joyce, B.A.

  • Volume
    43
  • Issue
    1.2
  • fYear
    1973
  • Firstpage
    21
  • Lastpage
    28
  • Abstract
    This paper describes the preparation of semiconductor single crystal material in bulk and thin films. Particular emphasis is placed on silicon and gallium arsenide, and the growth methods are described in relation to the electrical characteristics which are required for device fabrication.
  • fLanguage
    English
  • Journal_Title
    Radio and Electronic Engineer
  • Publisher
    iet
  • ISSN
    0033-7722
  • Type

    jour

  • DOI
    10.1049/ree.1973.0006
  • Filename
    5269429
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1484447