DocumentCode :
1484447
Title :
The technology of semiconductor materials preparation
Author :
Brice, J.C. ; Joyce, B.A.
Volume :
43
Issue :
1.2
fYear :
1973
Firstpage :
21
Lastpage :
28
Abstract :
This paper describes the preparation of semiconductor single crystal material in bulk and thin films. Particular emphasis is placed on silicon and gallium arsenide, and the growth methods are described in relation to the electrical characteristics which are required for device fabrication.
fLanguage :
English
Journal_Title :
Radio and Electronic Engineer
Publisher :
iet
ISSN :
0033-7722
Type :
jour
DOI :
10.1049/ree.1973.0006
Filename :
5269429
Link To Document :
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