Title :
The technology of semiconductor materials preparation
Author :
Brice, J.C. ; Joyce, B.A.
Abstract :
This paper describes the preparation of semiconductor single crystal material in bulk and thin films. Particular emphasis is placed on silicon and gallium arsenide, and the growth methods are described in relation to the electrical characteristics which are required for device fabrication.
Journal_Title :
Radio and Electronic Engineer
DOI :
10.1049/ree.1973.0006