Curie temperature and pass through flux of CoCr-based target alloys

Author

Schlott, M. ; Weigert, M. ; Gehman, B.L.

Author_Institution

Degussa AG, Hanau, Germany

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

3001

Lastpage

3003

Abstract

CoCr-based target alloys with increased Cr content and additions of Pt or Ta are being used more frequently for the sputter deposition of magnetic recording layers. Targets made from such alloys were investigated regarding their microstructure and Pass Through Flux (PTF). Often these targets have Curie Temperatures (T_c) not much above RT, some are in fact paramagnetic. Depending on T_c targets become quite sensitive to changes in composition or operation temperature. The influence of the alloy´s Cr, Pt, and Ta content on T _c and adequate measures to achieve high and stable PTF are discussed

Keywords

Curie temperature; chromium alloys; cobalt alloys; ferromagnetic materials; magnetic recording; magnetic thin films; sputter deposition; CoCr-based target alloy; CoCrPt; CoCrTa; Curie temperature; composition; magnetic recording layer; microstructure; pass through flux; sputter deposition; Chromium alloys; Magnetic field measurement; Magnetic fields; Magnetic materials; Magnetic recording; Microstructure; Paramagnetic materials; Platinum alloys; Sputtering; Temperature dependence; Temperature sensors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.617824

Filename

617824