DocumentCode :
1485195
Title :
Handbook of plasma immersion ion implantation and deposition [Book Review]
Volume :
17
Issue :
2
fYear :
2001
fDate :
3/1/2001 12:00:00 AM
Firstpage :
46
Lastpage :
46
Keywords :
Book reviews; Coatings; Ion implantation; Magnetic materials; Passive networks; Plasma accelerators; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Semiconductor materials;
fLanguage :
English
Journal_Title :
Circuits and Devices Magazine, IEEE
Publisher :
ieee
ISSN :
8755-3996
Type :
jour
DOI :
10.1109/MCD.2001.920878
Filename :
920878
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1485195
