• DocumentCode
    1485195
  • Title

    Handbook of plasma immersion ion implantation and deposition [Book Review]

  • Volume
    17
  • Issue
    2
  • fYear
    2001
  • fDate
    3/1/2001 12:00:00 AM
  • Firstpage
    46
  • Lastpage
    46
  • Keywords
    Book reviews; Coatings; Ion implantation; Magnetic materials; Passive networks; Plasma accelerators; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Semiconductor materials;
  • fLanguage
    English
  • Journal_Title
    Circuits and Devices Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    8755-3996
  • Type

    jour

  • DOI
    10.1109/MCD.2001.920878
  • Filename
    920878
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1485195