Title :
Electrostatic Comb Drive Levitation And Control Method
Author :
Tang, William C. ; Lim, Martin G. ; Howe, Roger T.
Author_Institution :
Ford Motor Company
fDate :
12/1/1992 12:00:00 AM
Keywords :
Accelerometers; Actuators; Capacitors; Electrostatic levitation; Fingers; Microactuators; Q factor; Substrates; Suspensions; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1992.752508
