DocumentCode

1485384

Title

Electrostatic Comb Drive Levitation And Control Method

Author

Tang, William C. ; Lim, Martin G. ; Howe, Roger T.

Author_Institution

Ford Motor Company

Volume

1

Issue

4

fYear

1992

fDate

12/1/1992 12:00:00 AM

Firstpage

170

Lastpage

178

Keywords

Accelerometers; Actuators; Capacitors; Electrostatic levitation; Fingers; Microactuators; Q factor; Substrates; Suspensions; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.1992.752508

Filename

752508