Title :
Selective Mode Excitation And Detection Of Micromachined Resonators
Author :
Prak, Albert ; Elwenspoek, Miko ; Fluitman, Jan H J
Author_Institution :
University of Twente
fDate :
12/1/1992 12:00:00 AM
Keywords :
Bridge circuits; Capacitive sensors; Electrodes; Mechanical systems; Oscillators; Resonance; Shape control; Strain measurement; Stress; Vibrations;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1992.752509
