DocumentCode

1485405

Title

An Etch-stop Utilizing Selective Etching Of N-type Silicon By Pulsed Potential Anodization

Author

Wang, Simon S. ; McNeil, Vincent M. ; Schmidt, Martin A.

Author_Institution

General Motors Research Laboratories

Volume

1

Issue

4

fYear

1992

fDate

12/1/1992 12:00:00 AM

Firstpage

187

Lastpage

192

Keywords

Biomembranes; Diodes; Electrodes; Etching; Laboratories; Leakage current; Microstructure; P-n junctions; Silicon; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.1992.752510

Filename

752510