Title :
A Microstructure For Measurement Of Thermal Conductivity Of Polysilicon Thin Films
Author :
Völklein, Friedemann ; Balles, H.
Author_Institution :
Quantum Electronics
fDate :
12/1/1992 12:00:00 AM
Keywords :
CMOS integrated circuits; CMOS process; CMOS technology; Conductive films; Conductivity measurement; Etching; Microstructure; Silicon; Thermal conductivity; Transistors;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1992.752511
