Title :
Improved optical filter responses in cascaded InGaAsP/InP microdisk resonators
Author :
Ma, Y. ; Chang, S.H. ; Chang, S.S. ; Ho, S.T.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL, USA
fDate :
4/26/2001 12:00:00 AM
Abstract :
Cascaded InGaAsP/InP microdisk resonators as optical filters are fabricated by deep dry-etching. Compared with single microdisk resonators, these higher-order filters show steeper rolloffs and flatter passbands. The bandwidth ratios of 15 to 3dB for the single, three and five cascaded microdisk resonator filters are ~2.4, 1.4 and 1.2
Keywords :
III-V semiconductors; band-pass filters; etching; gallium arsenide; gallium compounds; indium compounds; micro-optics; optical couplers; optical fabrication; optical filters; optical resonators; optical waveguide filters; resonator filters; InGaAsP-InP; InGaAsP/InP; InGaAsP/InP microdisk resonators; bandwidth ratios; cascaded microdisk resonator filters; cascaded microdisk resonators; deep dry-etching; fabrication; flatter passbands; higher-order filters; optical filter responses; optical filters; passbands; rolloffs; single microdisk resonators;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010374
