DocumentCode
1485484
Title
Design Of Ion-implanted MOSFET´s with Very Small Physical Dimensions
Author
Dennard, Robert H. ; Gaensslen, Fritz H. ; YU, HWA-NIEN ; Rideout, V. Leo ; BASSOUS, ERNEST ; LEBLANC, ANDRE R.
Volume
87
Issue
4
fYear
1999
fDate
4/1/1999 12:00:00 AM
Firstpage
668
Lastpage
678
Keywords
Dielectric substrates; Digital integrated circuits; Doping profiles; Ion implantation; MOSFET circuits; Predictive models; Semiconductor process modeling; Silicon; Switching circuits; Threshold voltage;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/JPROC.1999.752522
Filename
752522
Link To Document